INTERFACE ANALYSIS USING ELASTIC-SCATTERING IN THE TRANSMISSION ELECTRON-MICROSCOPE - APPLICATION TO THE OXIDATION OF SILICON

被引：9

作者：

ROSS, FM

STOBBS, WM

机构：

来源：

SURFACE AND INTERFACE ANALYSIS | 1988年 / 12卷 / 1-12期

关键词：

D O I：

10.1002/sia.740120109

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：35 / 44

页数：10

共 24 条

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[9] NUMERICAL EVALUATION OF N-BEAM WAVE-FUNCTIONS IN ELECTRON-SCATTERING BY MULTI-SLICE METHOD [J].

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