INTERFACE ANALYSIS USING ELASTIC-SCATTERING IN THE TRANSMISSION ELECTRON-MICROSCOPE - APPLICATION TO THE OXIDATION OF SILICON

被引：9

作者：

ROSS, FM

STOBBS, WM

机构：

来源：

关键词：

D O I：

10.1002/sia.740120109

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：35 / 44

页数：10

共 24 条

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PITT, TJ ;

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[23] OXIDATION AND THE STRUCTURE OF THE SILICON-OXIDE INTERFACE [J].

STONEHAM, AM ;

GROVENOR, CRM ;

CEREZO, A .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1987, 55 (02) :201-210

[24]

WEAST CR, 1976, CRC HDB CHEM PHYSICS