A PHOTOTROPIC CRYSTAL-GROWTH OF BETA-TA2O5 BY KRF LASER PHOTOLYSIS OF TA(OCH3)5

被引：7

作者：

IMAI, Y

WATANABE, A

OSATO, K

KAMEYAMA, T

FUKUDA, K

机构：

来源：

CHEMISTRY LETTERS | 1990年 / 02期

关键词：

D O I：

10.1246/cl.1990.177

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：177 / 180

页数：4

共 9 条

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[5]

NISHIZAWA J, 1986, J VAC SCI TECHNOL A, V4, P706, DOI 10.1116/1.573838

[6]

OKADA M, 1985, DENKI KAGAKU, V53, P109

[7] WAVELENGTH DEPENDENCE OF LASER-ENHANCED OXIDATION OF SILICON [J].

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LYON, SA .

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[8] LASER-INDUCED DEPOSITION OF ZINC-OXIDE [J].

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COLLINS, GJ .

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[9] PHOTO-CVD OF TANTALUM OXIDE FILM FROM PENTAMETHOXY TANTALUM FOR VLSI DYNAMIC MEMORIES [J].

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