PHOTOENHANCED CVD OF HYDROGENATED AMORPHOUS-SILICON USING AN INTERNAL HYDROGEN DISCHARGE LAMP

被引：6

作者：

MILNE, WI

CLOUGH, EJ

DEANE, SC

BAKER, SD

ROBERTSON, PA

机构：

来源：

APPLIED SURFACE SCIENCE | 1989年 / 43卷

关键词：

D O I：

10.1016/0169-4332(89)90225-0

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：277 / 284

页数：8

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