CLOSED BOAT - NEW APPROACH FOR SEMICONDUCTOR BATCH PROCESSING

被引：11

作者：

HEARN, EW ^{[1
]}

TEKAAT, EH ^{[1
]}

SCHWUTTKE, GH ^{[1
]}

机构：

[1] IBM CORP E FISHKILL LAB,HOPEWELL JUNCTION,NY 12533

来源：

MICROELECTRONICS AND RELIABILITY | 1976年 / 15卷 / 01期

关键词：

D O I：

10.1016/0026-2714(76)90144-X

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：61 / 66

页数：6

相关论文

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