SUBPLANTATION MODEL FOR FILM GROWTH FROM HYPERTHERMAL SPECIES - APPLICATION TO DIAMOND

被引：463

作者：

LIFSHITZ, Y

KASI, SR

RABALAIS, JW

机构：

来源：

关键词：

D O I：

10.1103/PhysRevLett.62.1290

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：1290 / 1293

页数：4

共 20 条

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[2] ANDERSEN HH, 1981, SPUTTERING PARTICLE, V1, pCH4
[3] ANGUS JC, 1986, PLASMA DEPOSITED THI, pCH4
[4] CHAIKOVSKII EF, 1981, SOV PHYS-CRYSTALLOGR, V26, P122
[5] DEARNALEY G, 1973, ION IMPLANTATION, P155
[6] FELDMAN LC, 1986, FUNDAMENTALS SURFACE, pCH6
[7] GREENE JE, 1987, SOLID STATE TECHNOL, V30, P115
[8] Harper J.M.E., 1984, ION BOMBARDMENT MODI
[9] TRANSPARENT CARBON-FILM PREPARED BY MASS-SEPARATED NEGATIVE-CARBON-ION-BEAM DEPOSITION
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OGAWA, K
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[J]. JOURNAL OF APPLIED PHYSICS, 1987, 61 (07) : 2509 - 2515
[10] INTERACTIONS OF LOW-ENERGY REACTIVE IONS WITH SURFACES .4. CHEMICALLY BONDED DIAMOND-LIKE FILMS FROM ION-BEAM DEPOSITION
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KANG, H
RABALAIS, JW
[J]. JOURNAL OF CHEMICAL PHYSICS, 1988, 88 (09) : 5914 - 5924