VARIABLE REFRACTIVE-INDEX AND BIREFRINGENT WAVEGUIDES BY SPUTTERING TANTALUM IN O2-N2 MIXTURES

被引：40

作者：

INGREY, SJ ^{[1
]}

WESTWOOD, WD ^{[1
]}

CHENG, YC ^{[1
]}

WEI, J ^{[1
]}

机构：

[1] BELL NO RES,POB 3511,STN C,OTTAWA K1Y 4HF,ONTARIO,CANADA

来源：

APPLIED OPTICS | 1975年 / 14卷 / 09期

关键词：

D O I：

10.1364/AO.14.002194

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：2194 / 2198

页数：5

共 24 条

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[8]

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[9] INVESTIGATIONS ON TA2N OXIDE-FILMS [J].

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[10]

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