ELECTRON-BEAM EXPOSURE OF OPTICAL GRATINGS

被引：6

作者：

YANG, L ^{[1
]}

TURNER, JJ ^{[1
]}

RHODES, LB ^{[1
]}

TANG, CL ^{[1
]}

BALLANTY.JM ^{[1
]}

机构：

[1] CORNELL UNIV,SCH ELECT ENGN,ITHACA,NY 14850

来源：

关键词：

D O I：

10.1109/JQE.1974.1068144

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：391 / 393

页数：3

共 13 条

[1] BALLANTYNE JM, 1972, 1 P NSF GRANT US M O
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[3] BREWER GR, 1972, SOLID STATE TECHNOL, P43
[4] GRATING COUPLER FOR EFFICIENT EXCITATION OF OPTICAL GUIDED WAVES IN THIN FILMS
DAKSS, ML
KUHN, L
HEIDRICH, PF
SCOTT, BA
[J]. APPLIED PHYSICS LETTERS, 1970, 16 (12) : 523 - +
[5] ELECTRON-RESIST FABRICATION OF BENDS AND COUPLERS FOR INTEGRATED OPTICAL CIRCUITS
GOELL, JE
[J]. APPLIED OPTICS, 1973, 12 (04) : 729 - 736
[6] GREENEICH JS, 1973, 12 S EL ION LAS BEAM
[7] HATZAKIS M, 11 S EL ION LAS BEAM, P337
[8] HERZOG RF, 11 S EL ION LAS BEAM, P483
[9] PASIECZNIK J, 1973, 12 S EL ION LAS BEAM
[10] THIN-FILM DISTRIBUTED-FEEDBACK LASER FABRICATED BY ION MILLING
SCHINKE, DP
SMITH, RG
SPENCER, EG
GALVIN, MF
[J]. APPLIED PHYSICS LETTERS, 1972, 21 (10) : 494 - &