COMPUTER-SIMULATION OF SPUTTERING OF CLUSTERS

被引:113
作者
HARRISON, DE [1 ]
DELAPLAIN, CB [1 ]
机构
[1] USN,POSTGRAD SCH,MONTEREY,CA 93940
基金
美国国家科学基金会;
关键词
D O I
10.1063/1.323014
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:2252 / 2259
页数:8
相关论文
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