MASS SPECTROMETRIC STUDY OF NEUTRAL PARTICLES SPUTTERED FROM CU BY 0- TO 100-EV AR IONS

被引：88

作者：

WOODYARD, JR

COOPER, CB

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1964年 / 35卷 / 04期

关键词：

D O I：

10.1063/1.1713576

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1107 / &

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