PREPARATION OF LOW-REFLECTIVITY AMORPHOUS-SILICON USING DC MAGNETRON SPUTTERING

被引：5

作者：

MAKINO, T

KAMOSHIDA, K

YAMAMOTO, E

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1984年 / 23卷 / 10期

关键词：

D O I：

10.1143/JJAP.23.1304

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1304 / 1309

页数：6

共 19 条

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