REPLICATION OF 50-NM-LINEWIDTH DEVICE PATTERNS USING PROXIMITY X-RAY-LITHOGRAPHY AT LARGE GAPS

We demonstrate the replication of device patterns consisting of interdigital lines approximately 50 nm wide on 100 nm pitch using 1.32 nm x rays at a mask-to-substrate gap of 2.72-mu-m. The exposure latitude exceeds the factor 2.3 at this gap. From the expression that relates gap, G, linewidth, W, and wavelength-lambda (i.e., G = alpha-W2/lambda), we obtain alpha = 1.44, which is well beyond the predictions of previous theoretical analyses based on the Kirchhoff boundary conditions. We attribute this disparity to the fact that an x-ray absorber is a lossy dielectric, hundreds of wavelengths thick, and hence the Kirchhoff boundary conditions are not applicable.