REPLICATION OF 175-A LINES AND SPACES IN POLYMETHYLMETHACRYLATE USING X-RAY-LITHOGRAPHY

被引：69

作者：

FLANDERS, DC

机构：

来源：

APPLIED PHYSICS LETTERS | 1980年 / 36卷 / 01期

关键词：

D O I：

10.1063/1.91287

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：93 / 96

页数：4

共 17 条

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