BIREFRINGENCE CONTROL AND DISPERSION CHARACTERISTICS OF SILICON OXYNITRIDE OPTICAL WAVE-GUIDES

被引：16

作者：

AARNIO, J ^{[1
]}

HEIMALA, P ^{[1
]}

DELGIUDICE, M ^{[1
]}

BRUNO, F ^{[1
]}

机构：

[1] ALCATEL,FACE RES CTR,I-00040 POMEZIA,ITALY

来源：

ELECTRONICS LETTERS | 1991年 / 27卷 / 25期

关键词：

OPTICAL WAVE-GUIDES; BIREFRINGENCE; INTEGRATED OPTICS;

D O I：

10.1049/el:19911435

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The design, fabrication and characterisation of birefringent silicon oxynitride planar optical waveguides are described for applications at the wavelength of 1.54-mu-m. Form birefringence is attained by interposing a thin silicon nitride film in the waveguide stack, and can be controlled by adjusting the nitride layer thickness. Dispersion characteristics of the oxynitride waveguides have been measured and compared with theory.

引用

页码：2317 / 2318

页数：2