A NOVEL AFM/STM/SEM SYSTEM

被引：33

作者：

ERMAKOV, AV

GARFUNKEL, EL

机构：

[1] RUTGERS STATE UNIV,SURFACE MODIFICAT LAB,PISCATAWAY,NJ

[2] ST PETERSBURG STATE UNIV,INST PHYS,PETRODVORETS 190000,RUSSIA

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1994年 / 65卷 / 09期

关键词：

D O I：

10.1063/1.1144627

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

An atomic force/scanning tunneling (AFM/STM) microscope intended for operation inside a scanning electron microscope (SEM) is described. This AFM/STM/SEM system enables us to image a sample conventionally by SEM as well as to investigate the local surface topography by AFM or STM. This device incorporates a new method for monitoring AFM cantilever deflection that utilizes the focused electron beam of the SEM.

引用

页码：2853 / 2854

页数：2

共 6 条

[1] ATOMIC FORCE MICROSCOPE [J].