SUPPRESSION OF SPUTTERING OF NICKEL BY COVERAGE WITH SELF-SUSTAINING THIN SEGREGATED CARBON LAYERS

被引：28

作者：

MORITA, K

TSUCHIYA, T

HAYASHIBARA, M

ITOH, N

机构：

来源：

关键词：

D O I：

10.1016/0022-3115(83)90292-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：63 / 68

页数：6

共 14 条

[1]

ANDERSEN HH, 1980, 10TH YUG SUMM SCH S

[2]

ANDERSEN N, 1974, K DAN VIDENSK SELSK, V39

[3] AUGER SPECTROSCOPY OF CARBON ON NICKEL [J].

COAD, JP ;

RIVIERE, JC .

KELLY, R .

[5]

KRAUSS AR, 1981, J NUCL MATER, V103, P239

[6]

MCCRACKEN GM, 1978, P INT C PLASMA SURFA

[7]

MORITA K, 1981, J NUCL MATER, V103, P1374

[8]

MORITA K, 1980, P S SPUTTERING, P469

[9]

MUSSARA TA, 1971, J APPL PHYS, V42, P5534

NAKAMURA, H ;

MORITA, K ;

ITOH, N .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 191 (1-3) :119-123