HIGHLY EFFICIENT COUPLING BETWEEN LD ARRAY AND OPTICAL-FIBER ARRAY USING SI MICROLENS ARRAY

被引：12

作者：

NAKAGAWA, G

MIURA, K

MAKIUCHI, M

YANO, M

机构：

[1] Optical Device Laboratory, Optical Interconnection Division, Fujitsu Laboratories Ltd.

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1993年 / 5卷 / 09期

关键词：

Etching - Fiber optics - Photoresists - Semiconductor lasers - Silicon;

D O I：

10.1109/68.257190

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

By using a Si microlens array, highly efficient coupling is realized between laser diode (LD) and optical-fiber arrays. The Si microlens is fabricated by transferring the lens shape of photoresist onto the Si surface using an etching process. For an optimal coupling scheme, a high-NA microlens with a diameter of 240 mum and focal length of 190 mum is designed and fabricated. The optical coupling efficiency for a four-channel system is -4.8 +/- 0.3 dB between an LD array with lasing wavelength of 1.55 mum and a single-mode fiber array, which is the best data reported so far. Optical crosstalk exceeds -70 dB at the 250-mum distant neighbor channel.

引用

页码：1056 / 1058

页数：3

共 4 条

[1] MICROLENS ARRAYS FOR INTERCONNECTION OF SINGLEMODE FIBER ARRAYS [J].