ROLE OF HYDROGEN IN SPUTTERING OF NICKEL-CHROMIUM FILMS

[1] DEGENHART HJ, 1963, 10 T NAT VAC S, P480

[2] JONES RL, PRIVATE COMMUNICATIO

[3] THIN FILMS DEPOSITED BY BIAS SPUTTERING [J]. JOURNAL OF APPLIED PHYSICS, 1965, 36 (01) : 237 - &

[4] MCDANIEL EW, 1964, COLLISION PHENOMENA, P188

[5] MOORE W, 1960, AM SCI, V48, P116

[6] PRATT IH, 1964, P NAT ELEC C, V20, P215

[7] SCHWARTZ N, 1963, 10 T NAT VAC S, P325

[8] SOSNIAK Y, 1965, 12 AVS VAC S

[9] STERN E, 1966, MAY EL COMP C

[10] VONGUNTHERSCHUL.A, 1937, Z PHYSIK, V106, P365

[1] DEGENHART HJ, 1963, 10 T NAT VAC S, P480

[2] JONES RL, PRIVATE COMMUNICATIO

[3] THIN FILMS DEPOSITED BY BIAS SPUTTERING [J]. JOURNAL OF APPLIED PHYSICS, 1965, 36 (01) : 237 - &

[4] MCDANIEL EW, 1964, COLLISION PHENOMENA, P188

[5] MOORE W, 1960, AM SCI, V48, P116

[6] PRATT IH, 1964, P NAT ELEC C, V20, P215

[7] SCHWARTZ N, 1963, 10 T NAT VAC S, P325

[8] SOSNIAK Y, 1965, 12 AVS VAC S

[9] STERN E, 1966, MAY EL COMP C

[10] VONGUNTHERSCHUL.A, 1937, Z PHYSIK, V106, P365