POSITRON LIFETIME STUDY OF VACANCY DEFECTS IN NON-STOICHIOMETRIC TINX AND TICX FILMS

被引：20

作者：

BRUNNER, J ^{[1
]}

PERRY, AJ ^{[1
]}

机构：

[1] GTE VALENITE CORP,TROY,MI 48084

来源：

THIN SOLID FILMS | 1988年 / 163卷

关键词：

D O I：

10.1016/0040-6090(88)90409-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：49 / 54

页数：6

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[9] PROPERTIES AND STRUCTURE OF CARBON EXCESS TIXC1-X DEPOSITED ONTO MOLYBDENUM BY MAGNETRON SPUTTERING [J].

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