DEPOSITION OF TITANIUM NITRIDE ON SURFACE-HARDENED STRUCTURAL-STEEL BY REACTIVE MAGNETRON SPUTTERING

被引:16
作者
ALJAROUDI, MY
HENTZELL, HTG
HORNSTROM, SE
BENGTSON, A
机构
[1] LINKOPING UNIV,DEPT PHYS & MEASUREMENT TECHNOL,THIN FILM GRP,S-58183 LINKOPING,SWEDEN
[2] SWEDISH INST MET RES,S-11428 STOCKHOLM,SWEDEN
关键词
D O I
10.1016/0040-6090(89)90252-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:153 / 166
页数:14
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