DEPOSITION OF TITANIUM NITRIDE ON SURFACE-HARDENED STRUCTURAL-STEEL BY REACTIVE MAGNETRON SPUTTERING

被引：16

作者：

ALJAROUDI, MY

HENTZELL, HTG

HORNSTROM, SE

BENGTSON, A

机构：

[1] LINKOPING UNIV,DEPT PHYS & MEASUREMENT TECHNOL,THIN FILM GRP,S-58183 LINKOPING,SWEDEN

[2] SWEDISH INST MET RES,S-11428 STOCKHOLM,SWEDEN

来源：

THIN SOLID FILMS | 1989年 / 182卷

关键词：

D O I：

10.1016/0040-6090(89)90252-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：153 / 166

页数：14

相关论文

共 16 条

[1] THE INFLUENCE OF TITANIUM NITRIDE SPUTTER DEPOSITION TEMPERATURE ON SURFACE-HARDENED 2.5-PERCENT SILICON-IRON
ALJAROUDI, MY
HENTZELL, HTG
BENGTSON, A
[J]. THIN SOLID FILMS, 1989, 170 (02) : 293 - 307
[2] IN-DEPTH COMPOSITIONAL PROFILE ANALYSIS OF ALLOYS USING OPTICAL EMISSION GLOW-DISCHARGE SPECTROGRAPHY
BELLE, CJ
JOHNSON, JD
[J]. APPLIED SPECTROSCOPY, 1973, 27 (02) : 118 - 124
[3] A CONTRIBUTION TO THE SOLUTION OF THE PROBLEM OF QUANTIFICATION IN SURFACE-ANALYSIS WORK USING GLOW-DISCHARGE ATOMIC EMISSION-SPECTROSCOPY
BENGTSON, A
[J]. SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1985, 40 (04) : 631 - 639
[4] DEPTH PROFILING OF THIN-FILMS USING A GRIMM-TYPE GLOW-DISCHARGE LAMP
BENGTSON, A
DANIELSSON, L
[J]. THIN SOLID FILMS, 1985, 124 (3-4) : 231 - 236
[5] STUDIES OF SPUTTERING IN A GLOW-DISCHARGE FOR SPECTROCHEMICAL ANALYSIS
BOUMANS, PWJ
[J]. ANALYTICAL CHEMISTRY, 1972, 44 (07) : 1219 - &
[6] FUNNSJO G, 1980, SCAND J METALL, P205
[7] FUNNSJO G, 1980, SCAND J METALL, P199
[8] GLASKI FA, 1972, 3RD P INT C CHEM VAP, P340
[9] GLOW-DISCHARGE OPTICAL SPECTROSCOPY FOR ANALYSIS OF THIN-FILMS
GREENE, JE
WHELAN, JM
[J]. JOURNAL OF APPLIED PHYSICS, 1973, 44 (06) : 2509 - 2513
[10] NEW GLOW DISCHARGE LAMP FOR OPTICAL EMISSION SPECTRAL ANALYSIS
GRIMM, W
[J]. SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1968, B 23 (07) : 443 - &