HIGH-RESOLUTION AND HIGH-FIDELITY X-RAY MASK STRUCTURE EMPLOYING EMBEDDED ABSORBERS

被引：5

作者：

CHOU, SY

MALUF, NI

PEASE, RFW

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 06期

关键词：

D O I：

10.1116/1.584082

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：2202 / 2206

页数：5

共 12 条

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