ANALYSIS OF SURFACE-LAYERS BY CHANNELING TECHNIQUE - BEAM ENERGY-DEPENDENCE

被引：12

作者：

DELLAMEA, G

DRIGO, AV

LORUSSO, S

MAZZOLDI, P

YAMAGUCHI, S

BENTINI, GG

机构：

[1] UNIV PADUA,IST FIS,UNITA GRP NAZL STRUTTURA MAT,PADUA,ITALY

[2] CNR,LAB CHIM & TECNOL MAT & COMPONENTI ELETTR,BOLOGNA,ITALY

来源：

APPLIED PHYSICS LETTERS | 1975年 / 26卷 / 04期

关键词：

D O I：

10.1063/1.88098

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：147 / 150

页数：4

共 10 条

[1] MONTE CARLO CHANNELING CALCULATIONS [J].

BARRETT, JH .

PHYSICAL REVIEW B, 1971, 3 (05) :1527-&

[2]

BARRETT JH, 1973, 5 P INT C AT COLL SO

[3] LINE-SHAPE EXTRACTION ANALYSIS OF SILICON-OXIDE LAYERS ON SILICON BY CHANNELING EFFECT MEASUREMENTS [J].

CHU, WK ;

LUGUJJO, E ;

MAYER, JW ;

SIGMON, TW .

THIN SOLID FILMS, 1973, 19 (02) :329-337

[4]

CHU WK, 1974, APPL PHYS L, V24, P105

[5]

DELLAMEA G, 1973, 5 P INT C AT COLL SO

[6]

DELLAMEA G, 1974, SESSION ETUDES CANAL

[7]

DELLAMEA G, 1972, RADIAT EFF, V13, P115

[8]

Eisen F.H., 1972, RADIAT EFF, V13, P93, DOI [10.1080/00337577208231165, DOI 10.1080/00337577208231165]

[9] CHANNELING-EFFECT ANALYSIS OF THIN FILMS ON SILICON - ALUMINUM OXIDE [J].

MITCHELL, IV ;

KAMOSHIDA, M ;

MAYER, JW .

JOURNAL OF APPLIED PHYSICS, 1971, 42 (11) :4378-+

[10]

VANDERWEG WF, 1973, RADIAT EFF, V17, P245

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