CRYSTALLINE ORIENTATION CONTROL FOR BI-SR-CA-CU-O THIN-FILMS PREPARED ON (110)SRTIO3 BY COEVAPORATION

被引：11

作者：

ISHIZUKA, Y

TERASHIMA, Y

MIURA, T

机构：

[1] Toshiba Research and Development Center, Saiwai-ku Kawasaki, 210

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1991年 / 30卷 / 6A期

关键词：

BI-SR-CA-CU-O; (110)SRTIO3; COEVAPORATION; RF OXYGEN PLASMA; CRYSTALLINE ORIENTATION;

D O I：

10.1143/JJAP.30.L1006

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Superconducting Bi-Sr-Ca-Cu-O thin films were prepared on (110)SrTiO3 substrates by coevaporation with an rf oxygen plasma. Four orientation categories were observed, the 2223-phase (119) orientation, the 2212-phase (119) orientation, the 2212-phase (117) orientation, and the 2212-phase (00n) orientation. It has been confirmed that these orientations can be controlled by changing the rf oxygen plasma conditions. The (00n) orientation grew as the oxygen flow rate increased or as the rf power increased.

引用

页码：L1006 / L1008

页数：3

共 6 条

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