FORMATION OF PLANAR N+ POCKETS IN GAAS FOR MIXER DIODE FABRICATION

被引:6
作者
GRIFFIN, JA [1 ]
SPENCER, MG [1 ]
HARRIS, GL [1 ]
COMAS, J [1 ]
机构
[1] USN,RES LAB,MOLEC BEAM EPITAXY SECT 3 5,WASHINGTON,DC 20375
关键词
D O I
10.1109/T-ED.1984.21669
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1096 / 1099
页数:4
相关论文
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