MATERIAL CHARACTERISTICS OF SPIN-ON GLASSES FOR INTERLAYER DIELECTRIC APPLICATIONS

被引：30

作者：

PAI, PL ^{[1
]}

CHETTY, A ^{[1
]}

ROAT, R ^{[1
]}

COX, N ^{[1
]}

TING, C ^{[1
]}

机构：

[1] INTEL CORP,COMPONENTS RES,SANTA CLARA,CA 95051

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 11期

关键词：

D O I：

10.1149/1.2100297

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2829 / 2834

页数：6

共 15 条

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