DRY ETCH-BACK OF OVERTHICK PSG FILMS FOR STEP-COVERAGE IMPROVEMENT

被引：5

作者：

MERCIER, JS

NAGUIB, HM

HO, VQ

NENTWICH, H

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1985年 / 132卷 / 05期

关键词：

D O I：

10.1149/1.2114068

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1219 / 1222

页数：4

共 20 条

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