THE STEP COVERAGE OF UNDOPED AND PHOSPHORUS-DOPED SIO2 GLASS-FILMS

被引：96

作者：

LEVIN, RM ^{[1
]}

EVANSLUTTERODT, K ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1983年 / 1卷 / 01期

关键词：

D O I：

10.1116/1.582542

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：54 / 61

页数：8

相关论文

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[7] OPTIMIZATION OF AL STEP COVERAGE THROUGH COMPUTER-SIMULATION AND SCANNING ELECTRON-MICROSCOPY
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[8] EVAPORATED FILM PROFILES OVER STEPS IN SUBSTRATES
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[9] BREWS JR, 1981, IEEE ELECTRON DEVICE, V1, P2
[10] DIGIACOMA G, 1981, 19TH ANN P REL PHYS, P218

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