A DIRECT MAPPING ALGORITHM FOR PHASE-MEASURING PROFILOMETRY

被引：185

作者：

ZHOU, WS

SU, XY

机构：

[1] Department of Optoelectronics, Sichuan University, Chengdu

来源：

JOURNAL OF MODERN OPTICS | 1994年 / 41卷 / 01期

关键词：

D O I：

10.1080/09500349414550101

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A direct phase-to-height mapping algorithm for phase-measuring profilometry is presented and verified by experiments. The direct mapping formula can be generated by measuring the phases of several different parallel planes rather than geometric parameters of the optical system. Therefore, it can speed up the calculation and reduce systematic errors.

引用

页码：89 / 94

页数：6

共 4 条

[1] AUTOMATED PHASE-MEASURING PROFILOMETRY - A PHASE MAPPING APPROACH [J].