ISLAND FILMS RESULTING FROM ION-BOMBARDMENT - SPECTROSCOPIC ELLIPSOMETRY AND AUGER-ELECTRON SPECTROSCOPY

被引：5

作者：

ARMSTRONG, MJ ^{[1
]}

MULLER, RH ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY, DEPT CHEM ENGN, BERKELEY, CA 94720 USA

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 08期

关键词：

D O I：

10.1063/1.342698

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3056 / 3060

页数：5

共 12 条

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[3]

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[8] MACROSCOPIC OPTICAL-MODEL FOR THE ELLIPSOMETRY OF AN UNDERPOTENTIAL DEPOSIT - LEAD ON COPPER AND SILVER [J].

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[9] FAST, SELF-COMPENSATING SPECTRAL-SCANNING ELLIPSOMETER [J].

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[10]

MULLER RH, 1973, ADV ELECTROCHEMISTRY, V9, P167

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