FAST, SELF-COMPENSATING SPECTRAL-SCANNING ELLIPSOMETER

被引：42

作者：

MULLER, RH ^{[1
]}

FARMER, JC ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,DEPT MECH ENGN,BERKELEY,CA 94720

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1984年 / 55卷 / 03期

关键词：

D O I：

10.1063/1.1137745

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：371 / 374

页数：4

共 23 条

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