PRECISION BOUNDS TO ELLIPSOMETER SYSTEMS

被引：45

作者：

ASPNES, DE ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

APPLIED OPTICS | 1975年 / 14卷 / 05期

关键词：

D O I：

10.1364/AO.14.001131

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

收藏

页码：1131 / 1136

页数：6

相关论文

共 33 条

[1] PHOTOELECTRIC ANALYSIS OF ELLIPTICALLY POLARIZED LIGHT
ARCHARD, JF
CLEGG, PL
TAYLOR, AM
[J]. PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON SECTION B, 1952, 65 (394): : 758 - 768
[2] Aspnes D. E., 1973, Optics Communications, V8, P222, DOI 10.1016/0030-4018(73)90132-6
[3] OPTIMIZING PRECISION OF ROTATING-ANALYZER ELLIPSOMETERS
ASPNES, DE
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (05) : 639 - 646
[4] HIGH PRECISION SCANNING ELLIPSOMETER
ASPNES, DE
STUDNA, AA
[J]. APPLIED OPTICS, 1975, 14 (01): : 220 - 228
[5] DIRECT VERIFICATION OF THIRD-DERIVATIVE NATURE OF ELECTROREFLECTANCE SPECTRA
ASPNES, DE
[J]. PHYSICAL REVIEW LETTERS, 1972, 28 (03) : 168 - &
[6] ASPNES DE, 1974, 12TH P INT C PHYS SE, P1197
[7] BILLARDON M, 1962, ANN PHYS-PARIS, V7, P233
[8] MODULATION ELLIPSOMETRY AND ITS APPLICATION TO STUDY OF ELECTRODE-ELECTROLYTE INTERFACE
CAHAN, BD
HORKANS, J
YEAGER, E
[J]. SURFACE SCIENCE, 1973, 37 (01) : 559 - 567
[9] A HIGH SPEED PRECISION AUTOMATIC ELLIPSOMETER
CAHAN, BD
SPANIER, RF
[J]. SURFACE SCIENCE, 1969, 16 : 166 - &
[10] OPTICAL MEASUREMENTS ON LIQUID METALS USING A NEW ELLIPSOMETER
FABER, TE
SMITH, NV
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1968, 58 (01) : 102 - &

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