PROCESSING OF TITANIUM FILMS ON SILICON USING A Q-SWITCHED RUBY-LASER

被引：2

作者：

MAYDELLONDRUSZ, E

HEMMENT, PLF

STEPHENS, KG

机构：

[1] Univ of Surrey, Guildford, Engl, Univ of Surrey, Guildford, Engl

来源：

THIN SOLID FILMS | 1986年 / 144卷 / 02期

关键词：

The authors would like to thank Dr. P. D. Scovell; Standard Telecommunication Laboratories; Harlow; and Dr. J. Speight; British Telecom Research Laboratories; Martlesham Heath; for the titanium films and the U.K. Science and Engineering Research Council for funding;

D O I：

10.1016/0040-6090(86)90421-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：289 / 296

页数：8

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