TIME-RESOLVED EMISSION-SPECTRA FOLLOWING THE 193-NM PHOTOABLATION OF CUO, BAO2, Y2O3, AND YBA2CU3O7-X IN VACUUM AND OXYGEN

被引：36

作者：

FRIED, D

RECK, GP

KUSHIDA, T

ROTHE, EW

机构：

[1] WAYNE STATE INST MFG RES,DETROIT,MI 48202

[2] WAYNE STATE UNIV,DEPT CHEM ENGN,DETROIT,MI 48202

来源：

JOURNAL OF APPLIED PHYSICS | 1991年 / 70卷 / 04期

关键词：

D O I：

10.1063/1.349430

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Gated diode array spectra were taken after the photoablation of CuO, BaO2, Y2O3, and YBa2Cu3O7 in vacuum and oxygen. An ArF excimer laser (193 nm) was used for photoablation. The spectra were resolved on a microsecond time scale. Emission from ions, atoms, and molecular oxides are observed and identified. Observations in the first microsecond represent phenomena produced in the primary ablation process. This emission is due primarily to high-energy collisions of ejected atoms and ions. Later time observations reveal that excited metal oxides are formed from reactive collisions of barium and yttrium atoms with the background oxygen, when present. Such species may be responsible for improved film quality in the presence of oxygen.

引用

页码：2337 / 2342

页数：6

共 34 条

[21] Pearse RWB, 1976, IDENTIFI CATION MOL, V4th, DOI DOI 10.1007/978-94-009-5758-9
[22] SUPERCONDUCTING PROPERTIES OF LASER EVAPORATED EPITAXIAL Y-BA-CU-O THIN-FILMS
ROAS, B
SCHULTZ, L
ENDRES, G
[J]. JOURNAL OF THE LESS-COMMON METALS, 1989, 151 (1-2): : 413 - 418
[23] LASER-INDUCED FLUORESCENCE OF BAO
SAKURAI, K
JOHNSON, SE
BROIDA, HP
[J]. JOURNAL OF CHEMICAL PHYSICS, 1970, 52 (04) : 1625 - &
[24] SCHAAP AP, 1976, SINGLET MOL OXYGEN
[25] INSITU PROCESSING OF EPITAXIAL Y-BA-CU-O HIGH-TC SUPERCONDUCTING FILMS ON (100) SRTIO3 AND (100) YS-ZRO2 SUBSTRATES AT 500-650-DEGREES-C
SINGH, RK
NARAYAN, J
SINGH, AK
KRISHNASWAMY, J
[J]. APPLIED PHYSICS LETTERS, 1989, 54 (22) : 2271 - 2273
[26] Striganov A. R., 1966, TABLITSY SPEKTRALNYK
[27] SUCHARD SN, 1975, SPECTROSCOPIC DATA, V1
[28] NATURE OF THE PULSED LASER PROCESS FOR THE DEPOSITION OF HIGH-TC SUPERCONDUCTING THIN-FILMS
VENKATESAN, T
WU, XD
INAM, A
JEON, Y
CROFT, M
CHASE, EW
CHANG, CC
WACHTMAN, JB
ODOM, RW
DIBROZOLO, FR
MAGEE, CA
[J]. APPLIED PHYSICS LETTERS, 1988, 53 (15) : 1431 - 1433
[29] WITIANACHCHI S, 1988, APPL PHYS LETT, V53, P234
[30] WU XD, 1989, APPL PHYS LETT, V54, P182

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