ION-BEAM INDUCED MODIFICATION OF ENERGY OF ADHESION FOR COPPER-FILMS ON AL2O3 SUBSTRATES

被引：21

作者：

SOOD, DK ^{[1
]}

BAGLIN, JEE ^{[1
]}

机构：

[1] IBM CORP, THOMAS J WATSON RES CTR, YORKTOWN HTS, NY 10598 USA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 19-20卷

关键词：

D O I：

10.1016/S0168-583X(87)80192-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：954 / 958

页数：5

相关论文

共 7 条

[1] ION-BEAM BONDING OF THIN-FILMS
BAGLIN, JEE
CLARK, GJ
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) : 881 - 885
[2] KIM KS, 1985, UILUENG856003 U ILL
[3] NUMERICAL VALUES OF THE SURFACE FREE-ENERGIES OF SOLID CHEMICAL-ELEMENTS
MEZEY, LZ
GIBER, J
[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 35 (02): : 87 - 89
[4] MITCHELL IV, 1984, THIN FILMS INTERFACE, V2, P189
[5] MEASUREMENT OF INTERFACIAL ENERGY AND ENERGY OF ADHESION BY SCANNING ELECTRON-MICROSCOPY
MURR, LE
[J]. MATERIALS SCIENCE AND ENGINEERING, 1973, 12 (5-6): : 277 - 283
[6] SCRATCH ADHESION TESTING OF HARD COATINGS
PERRY, AJ
[J]. THIN SOLID FILMS, 1983, 107 (02) : 167 - 180
[7] EQUILIBRIUM SHAPE OF A SMALL PARTICLE IN CONTACT WITH A FOREIGN SUBSTRATE
WINTERBO.WL
[J]. ACTA METALLURGICA, 1967, 15 (02): : 303 - &