DETERMINATION OF THE HYDROGEN DIFFUSION-COEFFICIENT IN HYDROGENATED AMORPHOUS-SILICON FROM HYDROGEN EFFUSION EXPERIMENTS

被引：164

作者：

BEYER, W

WAGNER, H

机构：

[1] Institut für Grenzflächenforschung und Vakuumphysik, Kernforschungsanlage Jülich, D-5170 Jülich, Germany

来源：

关键词：

D O I：

10.1063/1.330474

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：8745 / 8750

页数：6

共 24 条

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[5] BEYER WF, UNPUB
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[J]. THIN SOLID FILMS, 1976, 34 (01) : 131 - 134
[10] SIMS ANALYSIS OF DEUTERIUM DIFFUSION IN HYDROGENATED AMORPHOUS SILICON
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