AES, XPS AND TEM CHARACTERIZATION OF BORON-NITRIDE DEPOSITED UNDER CHEMICAL VAPOR INFILTRATION (CVI) CONDITIONS

被引：10

作者：

DUGNE, O

PROUHET, S

GUETTE, A

NASLAIN, R

FOURMEAUX, R

HSSEIN, K

SEVELY, J

GUIMON, C

GONBEAU, D

PFISTERGUILLOUZO, G

机构：

[1] CNRS,OPT ELECTR LAB,F-31055 TOULOUSE,FRANCE

[2] UNIV PAU & PAYS ADOUR,PHYS CHIM MOLEC LAB,CNRS,UNITE 474,F-64000 PAU,FRANCE

来源：

JOURNAL DE PHYSIQUE | 1989年 / 50卷 / C-5期

关键词：

D O I：

10.1051/jphyscol:1989540

中图分类号：

学科分类号：

摘要：

引用

页码：333 / 341

页数：9

共 24 条

[1]

ALESHIN VG, 1986, POROSHKOV METALL, V12, P76

[2] PREPARATION, PROPERTIES AND APPLICATIONS OF BORON-NITRIDE THIN-FILMS [J].

ARYA, SPS ;

DAMICO, A .

THIN SOLID FILMS, 1988, 157 (02) :267-282

[3]

BENDER B, 1986, AM CERAM SOC BULL, V65, P363

[4]

BORAVITCH LE, 1971, AD733292

[5]

GEBHARDT JJ, 1973, 4TH INT C CHEM VAP D, P460

[6] GRAPHITIZATION OF THIN CARBON-FILMS [J].

GOMA, J ;

OBERLIN, M .

THIN SOLID FILMS, 1980, 65 (02) :221-232

[7]

GOMA J, 1983, THESIS U ORLEANS

[8]

GRATEAU L, 1987, IN PRESS INT C CANT

[9] BORON-NITRIDE CHEMICAL VAPOR INFILTRATION OF FIBROUS MATERIALS FROM BCL3-NH3-H2 OR BF3-NH3 MIXTURES - A THERMODYNAMIC AND EXPERIMENTAL APPROACH [J].

HANNACHE, H ;

NASLAIN, R ;

BERNARD, C .

JOURNAL OF THE LESS-COMMON METALS, 1983, 95 (02) :221-246

[10]

HANNACHE H, 1984, J MATER SCI, V19, P202, DOI 10.1007/BF02403127

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