ION IMPLANTATION AS A PRODUCTION TECHNIQUE

被引：17

作者：

BURRILL, JT

KING, WJ

HARRISON, S

MCNALLY, P

机构：

来源：

关键词：

D O I：

10.1109/T-ED.1967.15887

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：10 / +

页数：1

共 22 条

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[3] KELLETT C, PRIVATE COMMUNICATIO
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