SPUTTERING OF MULTICOMPONENT MATERIALS - NUMERICAL-SOLUTION OF THE BALANCE EQUATION

被引：8

作者：

FALCONE, G

OLIVA, A

机构：

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1984年 / 33卷 / 03期

关键词：

D O I：

10.1007/BF00618751

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：175 / 178

页数：4

共 17 条

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FALCONE, G
SIGMUND, P
[J]. APPLIED PHYSICS, 1981, 25 (03): : 307 - 310
[7] Forsythe G.E., 1960, FINITE DIFFERENCE ME
[8] Hildebrand F. B., 1974, INTRO NUMERICAL ANAL
[9] THEORETICAL TREATMENT OF CASCADE MIXING IN DEPTH PROFILING BY SPUTTERING
HOFER, WO
LITTMARK, U
[J]. PHYSICS LETTERS A, 1979, 71 (5-6) : 457 - 460
[10] SIGMUND P, 1972, REV ROUM PHYS, V17, P1079