MAGNETRON-SPUTTERED AMORPHOUS-SILICON

被引：13

作者：

DEMICHELIS, F ^{[1
]}

TAGLIAFERRO, A ^{[1
]}

TRESSO, E ^{[1
]}

RAVA, P ^{[1
]}

机构：

[1] ELETTRORAVA SPA,I-10040 SAVONERA,ITALY

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 57卷 / 12期

关键词：

D O I：

10.1063/1.334867

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5424 / 5427

页数：4

共 19 条

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[2]

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TRESSO, E .

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[4] OPTICAL-CONSTANTS OF RF SPUTTERED HYDROGENATED AMORPHOUS SI [J].

FREEMAN, EC ;

PAUL, W .

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[5]

FRITZSCHE H, 1978, SOLID STATE TECHNOL, V21, P55

[6]

HEAVENS OS, 1955, OPTICAL PROPERTIES T, P196

[7]

IIJIMA S, 1980, JPN J APPL PHYS S, V19, P521

[8]

KOBAYASHI M, 1981, APPL PHYS LETT, V38, P69

[9]

KUWANO Y, 1982, AMORPHOUS SEMICONDUC, P80

[10] ELECTRON-HOLE RECOMBINATION IN REACTIVELY SPUTTERED AMORPHOUS-SILICON SOLAR-CELLS [J].

MOUSTAKAS, TD ;

WRONSKI, CR ;

TIEDJE, T .

APPLIED PHYSICS LETTERS, 1981, 39 (09) :721-723

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