MAGNETRON-SPUTTERED AMORPHOUS-SILICON

被引：13

作者：

DEMICHELIS, F ^{[1
]}

TAGLIAFERRO, A ^{[1
]}

TRESSO, E ^{[1
]}

RAVA, P ^{[1
]}

机构：

[1] ELETTRORAVA SPA,I-10040 SAVONERA,ITALY

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 57卷 / 12期

关键词：

D O I：

10.1063/1.334867

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5424 / 5427

页数：4

共 19 条

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[18]

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