SINGLE SIDE-BAND IMAGING IN HIGH-RESOLUTION ELECTRON-MICROSCOPY

被引:4
作者
HOHENSTEIN, M
机构
[1] Institut für Physik, Max-Planck-Institut für Metallforschung, Stuttgart 80, W-7000
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1992年 / 54卷 / 06期
关键词
D O I
10.1007/BF00324325
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
More then 20 years ago, Hanssen and Morgenstern [1] described the case of single sideband imaging in electron microscopy. Single sideband imaging allows to correct artifacts in the imaging process due to spherical aberration and defocus and to reconstruct the electron wave function at the exit surface of the sample from experimental micrographs. In the present work, optimized imaging parameters allowed us to obtain new experimental results, thus confirming the resolution limit of single sideband imaging (0.13 nm) to be close to the information limit of a JEOL 4000EX microscope. Furthermore, the reconstructed exit surface wave functions were throuroughly checked by using them to calculate a focus series, which was compared with an experimental focus series.
引用
收藏
页码:485 / 492
页数:8
相关论文
共 11 条
[1]   DIRECT OBSERVATION OF ATOMIC COLUMNS IN SEMICONDUCTORS BY HREM AT 400 KV [J].
BOURRET, A ;
ROUVIERE, JL ;
SPENDELER, J .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1988, 107 (02) :481-501
[2]  
HANSZEN KJ, 1965, Z ANGEW PHYSIK, V19, P215
[3]   RECONSTRUCTION OF THE EXIT SURFACE-WAVE FUNCTION FROM EXPERIMENTAL HRTEM MICROGRAPHS [J].
HOHENSTEIN, M .
ULTRAMICROSCOPY, 1991, 35 (02) :119-129
[4]  
HOHENSTEIN M, 1991, THESIS U STUTTGART
[5]  
Hoppe W., 1970, Optik, V30, P538
[6]  
HOPPE W, 1971, Z NATURFORSCH PT A, VA 26, P1155
[7]   CONTRAST TRANSFER OF CRYSTAL IMAGES IN TEM [J].
ISHIZUKA, K .
ULTRAMICROSCOPY, 1980, 5 (01) :55-65
[8]  
LICHTE H, 1991, ADV OPTICAL ELECTRON, V12
[9]  
Spence, 1998, EXPT HIGH RESOLUTION
[10]   EMS - A SOFTWARE PACKAGE FOR ELECTRON-DIFFRACTION ANALYSIS AND HREM IMAGE SIMULATION IN MATERIALS SCIENCE [J].
STADELMANN, PA .
ULTRAMICROSCOPY, 1987, 21 (02) :131-145