ELLIPSOMETRY OF ANODIC OXIDE-FILMS ON TUNGSTEN

被引：7

作者：

SARAKINOS, J ^{[1
]}

SPYRIDELIS, J ^{[1
]}

机构：

[1] ARISTOTLE UNIV THESSALONIKI,LAB PHYS A,THESSALONIKI,GREECE

来源：

关键词：

D O I：

10.1016/0040-6090(75)90030-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：239 / 245

页数：7

共 16 条

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[2] ALADJEM A, 1970, J VAC SCI TECHNOL, V6, P635
[3] DETERMINATION OF PROPERTIES OF FILMS ON SILICON BY METHOD OF ELLIPSOMETRY
ARCHER, RJ
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1962, 52 (09) : 970 - &
[4] BOOSZ HJ, 1964, METALL, V18, P466
[5] CHEZZO M, 1969, J PHYS D, V2, P1483
[6] DELLOCA CJ, 1969, THESIS U BRIT COLUMB
[7] Heavens OS, 1955, OPTICAL PROPERTIES T, P63
[8] LAVRENKO VA, 1961, RUSS J PHYS CHEM, V35, P537
[9] OPTICAL PROPERTIES OF ANODIC OXIDE FILMS ON TANTALUM, NIOBIUM, AND TANTALUM + NIOBIUM ALLOYS, AND THE OPTICAL CONSTANTS OF TANTALUM
MASING, L
ORME, JE
YOUNG, L
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1961, 108 (05) : 428 - 438
[10] MCCRACKIN FL, 1963, J RES NBS A, V67, P373