GROWTH OF METAL OVERLAYERS ON SEMICONDUCTOR SURFACES - A PROTOTYPE STUDY

被引:6
作者
BATRA, IP
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 02期
关键词
D O I
10.1116/1.583134
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
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页码:750 / 752
页数:3
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