EXPERIMENTAL INVESTIGATION OF SPUTTER-TOPOGRAPHIC EVALUATION OF A CYLINDRICAL SURFACE

被引:9
作者
MECKEL, BB [1 ]
NENADOVIC, T [1 ]
PEROVIC, B [1 ]
VLAHOV, A [1 ]
机构
[1] BORIS KIDRIC INST NUCL SCI, VINCA, 11001 BELGRADE, YUGOSLAVIA
关键词
D O I
10.1007/BF00541402
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:1188 / 1193
页数:6
相关论文
共 18 条
[1]   SPUTTERING YIELDS AND SPECIFIC ENERGY-LOSSES OF NOBLE GAS-IONS OF 5.6 KEV AT SIO2 GLASS [J].
BACH, H .
ZEITSCHRIFT FUR NATURFORSCHUNG PART A-ASTROPHYSIK PHYSIK UND PHYSIKALISCHE CHEMIE, 1972, A 27 (02) :333-&
[2]   PREDICTION OF ION-BOMBARDED SURFACE TOPOGRAPHIES USING FRANKS KINEMATIC THEORY OF CRYSTAL DISSOLUTION [J].
BARBER, DJ ;
FRANK, FC ;
MOSS, M ;
STEEDS, JW ;
TSONG, IST .
JOURNAL OF MATERIALS SCIENCE, 1973, 8 (07) :1030-1040
[3]   SECONDARY PROCESSES IN EVOLUTION OF SPUTTER-TOPOGRAPHIES [J].
BAYLY, AR .
JOURNAL OF MATERIALS SCIENCE, 1972, 7 (04) :404-&
[4]   EQUILIBRIUM TOPOGRAPHY OF SPUTTERED AMORPHOUS SOLIDS .2. [J].
CARTER, G ;
COLLIGON, JS ;
NOBES, MJ .
JOURNAL OF MATERIALS SCIENCE, 1971, 6 (02) :115-&
[5]   GROWTH OF TOPOGRAPHY DURING SPUTTERING OF AMORPHOUS SOLIDS .4. GENERALIZED THEORY [J].
CARTER, G ;
COLLIGON, JS ;
NOBES, MJ .
JOURNAL OF MATERIALS SCIENCE, 1973, 8 (10) :1473-1481
[6]   EQUILIBRIUM TOPOGRAPHY OF SPUTTERED AMORPHOUS SOLIDS .3. COMPUTER SIMULATION [J].
CATANA, C ;
CARTER, G ;
COLLIGON, JS .
JOURNAL OF MATERIALS SCIENCE, 1972, 7 (04) :467-&
[7]   DEVELOPMENT OF A GENERAL SURFACE CONTOUR BY ION EROSION - THEORY AND COMPUTER-SIMULATION [J].
DUCOMMUN, JP ;
CANTAGREL, M ;
MARCHAL, M .
JOURNAL OF MATERIALS SCIENCE, 1974, 9 (05) :725-736
[8]   MEASUREMENTS OF SPUTTER RATE OF FUSED SILICA BOMBARDED BY ARGON IONS OF ENERGY 12-32-KEV [J].
EDWIN, RP .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1973, 6 (07) :833-&
[9]  
Frank F.C., 1958, GROWTH PERFECTION CR, P6
[10]   EQUILIBRIUM TOPOGRAPHY OF SPUTTERED AMORPHOUS SOLIDS [J].
NOBES, MJ ;
COLLIGON, JS ;
CARTER, G .
JOURNAL OF MATERIALS SCIENCE, 1969, 4 (08) :730-&