THEORETICAL DEVELOPMENT FOR DEPTH PROFILING OF STRATIFIED LAYERS USING VARIABLE-ANGLE ATR

被引：24

作者：

SHICK, RA ^{[1
]}

KOENIG, JL ^{[1
]}

ISHIDA, H ^{[1
]}

机构：

[1] CASE WESTERN RESERVE UNIV,DEPT MACROMOLEC SCI,CLEVELAND,OH 44106

来源：

APPLIED SPECTROSCOPY | 1993年 / 47卷 / 08期

关键词：

ATR SPECTROSCOPY; INFRARED; REFLECTANCE SPECTROSCOPY; SURFACE ANALYSIS; SPECTROSCOPIC TECHNIQUES;

D O I：

10.1366/0003702934067856

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The theory allowing depth profile information to be recovered from variable-angle attenuated total reflection spectroscopy is shown for both perpendicular and parallel polarizations. The errors invoked by the necessary approximations are evaluated by comparison with exact optical simulations using dispersion theory.

引用

页码：1237 / 1244

页数：8

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