INSITU CHARACTERIZATION OF DIAMOND NUCLEATION AND GROWTH

被引:183
作者
BELTON, DN [1 ]
HARRIS, SJ [1 ]
SCHMIEG, SJ [1 ]
WEINER, AM [1 ]
PERRY, TA [1 ]
机构
[1] GM CORP,RES LABS,DEPT PHYS,WARREN,MI 48090
关键词
D O I
10.1063/1.100938
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:416 / 418
页数:3
相关论文
共 9 条
[1]   LOW-PRESSURE, METASTABLE GROWTH OF DIAMOND AND DIAMONDLIKE PHASES [J].
ANGUS, JC ;
HAYMAN, CC .
SCIENCE, 1988, 241 (4868) :913-921
[2]   ELECTRONIC EXCITATION IN ELECTRON-BOMBARDMENT ENHANCEMENT OF CHEMICAL-REACTIONS [J].
ASHBY, CIH .
APPLIED PHYSICS LETTERS, 1983, 43 (06) :609-611
[3]   MEASUREMENT OF STABLE SPECIES PRESENT DURING FILAMENT-ASSISTED DIAMOND GROWTH [J].
HARRIS, SJ ;
WEINER, AM ;
PERRY, TA .
APPLIED PHYSICS LETTERS, 1988, 53 (17) :1605-1607
[4]   HIGH-RATE SYNTHESIS OF DIAMOND BY DC PLASMA-JET CHEMICAL VAPOR-DEPOSITION [J].
KURIHARA, K ;
SASAKI, K ;
KAWARADA, M ;
KOSHINO, N .
APPLIED PHYSICS LETTERS, 1988, 52 (06) :437-438
[5]   SYNTHESIS OF DIAMOND FILMS IN A RF INDUCTION THERMAL PLASMA [J].
MATSUMOTO, S ;
HINO, M ;
KOBAYASHI, T .
APPLIED PHYSICS LETTERS, 1987, 51 (10) :737-739
[6]  
MATSUMOTO S, 1982, JPN J APPL PHYS, V21, P183
[7]   COMPARISON OF THE CKLL 1ST-DERIVATIVE AUGER-SPECTRA FROM XPS AND AES USING DIAMOND, GRAPHITE, SIC AND DIAMOND-LIKE-CARBON FILMS [J].
MIZOKAWA, Y ;
MIYASATO, T ;
NAKAMURA, S ;
GEIB, KM ;
WILMSEN, CW .
SURFACE SCIENCE, 1987, 182 (03) :431-438
[8]  
VARNIN VP, 1977, KRISTALLOGRAFIYA+, V22, P893
[9]  
Wagner C., 1979, HDB XRAY PHOTOELECTR