EMISSION-SPECTROSCOPY DURING EXCIMER LASER ABLATION OF GRAPHITE

Emission spectrum of the laser-induced plasma plume is obtained during KrF excimer laser ablation of graphite in argon and hydrogen gas mixture for deposition of diamond-like films. Bands of C2 and CN molecules dominate the spectrum while weak CI, CII, and Hα lines are also observed. From the emission intensities, molecular vibrational temperature is calculated to be (12-15)×103 K, and concentrations are estimated to be N(C2)=5×1014 cm-3 and N(CN)=2×1014 cm-3.