ANALYSIS OF ELECTRONIC GRADE CHLORINE BY SEALED INDUCTIVELY-COUPLED PLASMA-ATOMIC EMISSION-SPECTROSCOPY

The formation of an atmospheric pressure, pure chlorine discharge suitable for the direct analysis of electronic grade chlorine is described. Ten elements (Al, C, Ca, Cr, Cu, Fe, Mg, Mo, Ni, and Sn) were detected, and concentration calibration functions for C and Sn were obtained. Under flowing plasma conditions detection limits are 25 ppb (w/w) of Sn and 725 ppb (w/w) of C. Absolute detection limits are 7.2 ng of Sn and 216 ng of C. The temperature of the sealed chlorine plasma is approximately 12000 +/- 1000 K at an applied rf power of 1.0 kW in the non-flowing mode. The energy of the static chlorine discharge is greater than the energy of the flowing chlorine discharge.