DEVELOPMENT OF MEDIUM-ENERGY ION-SCATTERING AND MAGNETOOPTIC KERR-EFFECT APPARATUS FOR CHARACTERIZING ULTRATHIN MAGNETIC-FILMS

被引:6
作者
FOWLER, DE
HART, MW
BARTH, JV
机构
[1] IBM Research Division, Almaden Research Center, San Jose, CA 95120-6099
关键词
D O I
10.1016/0042-207X(95)00122-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The development of a state-of-the-art UHV surface science instrument is described. It has been built to study the relationship between the atomic structure and the magnetic anisotropy of ultrathin magnetic films and their interfaces. The unique aspect of this instrument is the particular combination of several in-situ surface techniques, MEIS and LEED for detailed atomic structural determination, XPS/UPS/AES for surface chemistry analysis, and magneto-optic Kerr effect (MOKE) for magnetic measurements. Additionally, the metal films are grown in situ with full control of the sample temperature throughout an experiment. The components are incorporated into a relatively compact system of three vacuum chambers and a 230 keV ion accelerator for the MEIS. The rotating MEIS ion analyzer uses a two-axis, scattering angle and energy, position sensitive detector. To allow the sample temperature to be fully controlled the sample remains on a single manipulator, with six-axis motion, at all times. The manipulator is moved to different analysis stations in the main chamber via motion of a large (67 cm dia.) differentially pumped rotating seal. Nonmagnetic materials were extensively used for compatibility with the 3 Tesla superconducting magnet used for the MOKE measurements. The successful implementation of the instrument is demonstrated with MEIS and MOKE results from Fe growth on Cu(100).
引用
收藏
页码:1127 / 1131
页数:5
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