PLASMA POLYMERIZED MEMBRANES AND GAS-PERMEABILITY .2.

Thin films were deposited onto porous substrates by plasma polymerization using three kinds of organosilicic compounds, tetramethylsilane (TMS), hexamethyldisiloxane (M//2), and octamethylcyclotetrasiloxane (D//4). Those composite membranes showed different characteristics of gas permeability. X-ray photoelectron spectroscopic observation indicated that all the plasma polymers contained more than two species of Si atom with differnt oxidation states. The greater part of Si atoms in plasma polymers took the same oxidation states in corresponding monomer. The gas permeability characteristics were closely related to the oxidation states of Si atom in the plasma polymers.